Published in

American Institute of Physics, Journal of Vacuum Science and Technology B, 6(24), p. 3188

DOI: 10.1116/1.2366700

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Highly porous silicon membrane fabrication using polymer self-assembly

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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