Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 6(23), p. 2954
DOI: 10.1116/1.2130349
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Three-dimensional polymer structures fabricated by reversal ultraviolet-curing imprint lithography
Journal article published in 2005 by
N. Kehagias,
M. Zelsmann,
C. M. Sotomayor Torres 
,
K. Pfeiffer,
G. Ahrens,
G. Gruetzner
,
K. Pfeiffer,
G. Ahrens,
G. Gruetzner
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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