Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 3(22), p. 1114
DOI: 10.1116/1.1715083
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Electron-beam lithography with aromatic self-assembled monolayers on silicon surfaces
Journal article published in 2004 by
A. Küller,
M. A. El-Desawy,
V. Stadler,
W. Geyer,
W. Eck,
A. Gölzhäuser 
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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