Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 1(22), p. 306
DOI: 10.1116/1.1638774
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Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Journal article published in 2004 by
R. Lindsay,
K. Henson,
W. Vandervorst,
K. Maex,
B. J. Pawlak,
R. Duffy,
R. Surdeanu,
P. Stolk,
J. A. Kittl 
,
S. Giangrandi,
X. Pages,
K. van der Jeugd
,
S. Giangrandi,
X. Pages,
K. van der Jeugd
This paper was not found in any repository, but could be made available legally by the author.
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