Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 4(21), p. 1247
DOI: 10.1116/1.1577130
Links
Tools
Barium–strontium–titanate etching characteristics in chlorinated discharges
Journal article published in 2003 by
Luc Stafford 
,
Joëlle Margot,
Olivier Langlois,
Mohamed Chaker
,
Joëlle Margot,
Olivier Langlois,
Mohamed Chaker
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 