Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 2(19), p. 410
DOI: 10.1116/1.1358881
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Electron temperature measurement in a slot antenna 2.45 GHz microwave plasma source
Journal article published in 2001 by
J. Cotrino,
A. Palmero,
V. Rico,
A. Barranco 
,
J. P. Espinós,
A. R. González-Elipe
,
J. P. Espinós,
A. R. González-Elipe
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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