CLEO: 2013
DOI: 10.1364/cleo_at.2013.jtu4a.30
American Society of Mechanical Engineers, Journal of Micro and Nano-Manufacturing, 2(2), p. 021004
DOI: 10.1115/1.4027127
We demonstrate a fast dispersive laser scanning system by using MEMS digital micro-mirror arrays technology. The proposed technique utilizes real-time dispersive imaging system, which captures spectrally encoded images with a single photodetector at pulse repetition rate via space-to-time mapping technology. Wide area scanning capability is introduced by using individually addressable micro-mirror arrays as a beam deflector. Experimentally, we scanned ∼20 mm2 at scan rate of 5 kHz with ∼150 μm lateral and ∼160 μm vertical resolution that can be controlled by using 1024 × 768 mirror arrays. With the current state of art MEMS technology, fast scanning with <30 μs and resolution down to single mirror pitch size of 10.8 μm is also achievable.