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Published in

CLEO: 2013

DOI: 10.1364/cleo_at.2013.jtu4a.30

American Society of Mechanical Engineers, Journal of Micro and Nano-Manufacturing, 2(2), p. 021004

DOI: 10.1115/1.4027127

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Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays

Journal article published in 2013 by Salih K. Kalyoncu, Yuewang Huang, Rasul Torun, Qiancheng Zhao ORCID, Ozdal Boyraz
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We demonstrate a fast dispersive laser scanning system by using MEMS digital micro-mirror arrays technology. The proposed technique utilizes real-time dispersive imaging system, which captures spectrally encoded images with a single photodetector at pulse repetition rate via space-to-time mapping technology. Wide area scanning capability is introduced by using individually addressable micro-mirror arrays as a beam deflector. Experimentally, we scanned ∼20 mm2 at scan rate of 5 kHz with ∼150 μm lateral and ∼160 μm vertical resolution that can be controlled by using 1024 × 768 mirror arrays. With the current state of art MEMS technology, fast scanning with <30 μs and resolution down to single mirror pitch size of 10.8 μm is also achievable.