Published in
IOP Publishing, Journal of Physics D: Applied Physics, 22(47), p. 224005
DOI: 10.1088/0022-3727/47/22/224005
Links
Tools
The effect of surface reactions of O, O3and N on film properties during the growth of silica-like films
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Preprint: archiving forbidden
Postprint:
archiving forbidden
Published version:
archiving forbidden
Data provided by 