Published in
Elsevier, Microelectronic Engineering, 7(88), p. 1317-1322
DOI: 10.1016/j.mee.2011.03.121
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Ultrathin EOT high-κ/metal gate devices for future technologies: Challenges, achievements and perspectives (invited)
Journal article published in 2011 by
L.-Å. Ragnarsson,
T. Chiarella,
M. Togo,
T. Schram 
,
P. Absil,
T. Hoffmann
,
P. Absil,
T. Hoffmann
This paper was not found in any repository, but could be made available legally by the author.
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