Published in
American Institute of Physics, Review of Scientific Instruments, 8(85), p. 083302
DOI: 10.1063/1.4892800
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Optimization of ion-atomic beam source for deposition of GaN ultrathin films
Journal article published in 2014 by
Tomáš Šamořil,
Miroslav Kolíbal,
Jindřich Mach,
Tomáš Šikola,
Miroslav Bartošík 
,
Jakub Zlámal,
Stanislav Voborny
,
Jakub Zlámal,
Stanislav Voborny
This paper was not found in any repository, but could be made available legally by the author.
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