Published in
American Institute of Physics, Journal of Applied Physics, 23(115), p. 233303, 2014
DOI: 10.1063/1.4884225
Links
Tools
Phase modulation in pulsed dual-frequency capacitively coupled plasmas
Journal article published in 2014 by
De-Qi Wen,
Quan-Zhi Zhang,
Wei Jiang,
Yuan-Hong Song,
Annemie Bogaerts 
,
You-Nian Wang
,
You-Nian Wang
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 