Published in
American Institute of Physics, Applied Physics Letters, 8(104), p. 081917
DOI: 10.1063/1.4867022
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Influence of hydrogen and hydrogen/methane plasmas on AlN thin films
Journal article published in 2014 by
P. Pobedinskas,
G. Degutis,
W. Dexters,
A. Hardy,
M. K. Van Bael 
,
K. Haenen
,
K. Haenen
This paper was not found in any repository, but could be made available legally by the author.
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