Published in
American Institute of Physics, Review of Scientific Instruments, 2(85), p. 02C304
DOI: 10.1063/1.4826604
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Gas feeding molecular phosphorous ion source for semiconductor implanters
Journal article published in 2014 by
V. I. Gushenets,
E. M. Oks 
,
A. S. Bugaev,
T. V. Kulevoy,
A. Hershcovitch
,
A. S. Bugaev,
T. V. Kulevoy,
A. Hershcovitch
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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