Published in
American Institute of Physics, Applied Physics Letters, 17(102), p. 172908, 2013
DOI: 10.1063/1.4801938
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High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-κ insulators (κ = 2.0-2.5)
Journal article published in 2013 by
V. V. Afanas'ev,
A. P. D. Nguyen,
M. Houssa 
,
A. Stesmans,
Z.-S. Tőkei,
M. R. Baklanov
,
A. Stesmans,
Z.-S. Tőkei,
M. R. Baklanov
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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