Published in
American Institute of Physics, Journal of Applied Physics, 10(71), p. 4751
DOI: 10.1063/1.350666
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Transition from a capacitive to a resistive regime in a silane radio frequency discharge and its possible relation to powder formation
Journal article published in 1992 by
J. P. Boeuf 
,
P.-H. Belenguer
,
P.-H. Belenguer
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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