Published in
American Institute of Physics, Applied Physics Letters, 6(93), p. 062903
DOI: 10.1063/1.2971032
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Spontaneous nanoclustering of ZrO[sub 2] in atomic layer deposited La[sub y]Zr[sub 1−y]O[sub x] thin films
Journal article published in 2008 by
K. B. Jinesh,
W. F. A. Besling,
E. Tois,
J. H. Klootwijk,
R. Wolters,
W. Dekkers,
M. Kaiser,
F. Bakker,
M. Tuominen,
F. Roozeboom
This paper is available in a repository.
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