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American Institute of Physics, Applied Physics Letters, 7(89), p. 073506

DOI: 10.1063/1.2336212

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Characterizing stress in ultrathin silicon wafers

Journal article published in 2006 by Indrajit Paul, Bivragh Majeed, Kafil M. Razeeb ORCID, John Barton
This paper is available in a repository.
This paper is available in a repository.

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