Published in
American Institute of Physics, Journal of Applied Physics, 2(94), p. 1258-1266, 2003
DOI: 10.1063/1.1582368
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Properties of rf-sputtered indium–tin-oxynitride thin films
Journal article published in 2003 by
Elias Aperathitis,
Marcus Bender,
Volker Cimalla,
Gernot Ecke,
Mircea Modreanu 
This paper is available in a repository.
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