Dissemin is shutting down on January 1st, 2025

Published in

American Institute of Physics, Applied Physics Letters, 12(67), p. 1727

DOI: 10.1063/1.115030

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Kinetic modeling of the atomic layer epitaxy processing window in group IV semiconductor growth

Journal article published in 1995 by Gyula Eres ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

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Preprint: archiving allowed
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Postprint: archiving allowed
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Published version: archiving restricted
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