Thin film synthesis and properties of copper nitride, a metastable semiconductor
Journal article published in 2014 by
Christopher M. Caskey,
Ryan M. Richards,
David S. Ginley,
Andriy Zakutayev 
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Abstract
Copper nitride (Cu3N) thin films were grown by reactive sputtering using a high-throughput combinatorial approach with orthogonal gradients of substrate temperature and target–substrate distance.