Dissemin is shutting down on January 1st, 2025

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Springer Verlag, Microsystem Technologies, 4-5(20), p. 571-584

DOI: 10.1007/s00542-013-1992-8

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Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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