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Beyer et al., 2004
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@article{Beyer2004, author = {Beyer, Dirk and Hudek, Peter and Fortagne, Olaf and Groves, Timothy and Gramss, Juergen}, month = {jan}, title = {Writing Nano-imprint Templates by Shaped E-beam Lithography}, url = {https://www.researchgate.net/profile/Peter_Hudek/publication/237286553_Writing_Nano-imprint_Templates_by_Shaped_E-beam_Lithography/links/55af8d5508ae32092e052034.pdf}, year = {2004} }
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Writing Nano-imprint Templates by Shaped E-beam Lithography
Journal article published in 2004 by
Dirk Beyer
,
Peter Hudek
,
Olaf Fortagne
,
Timothy Groves
,
Juergen Gramss
This paper is available in a repository.
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