Wiley-VCH Verlag, Chemical Vapor Deposition, 1(8), p. 17, 2002
DOI: 10.1002/1521-3862(20020116)8:1<17::aid-cvde17>3.0.co;2-3
Full text: Unavailable
The syntheses of three volatile IrI cyclooctadiene precursors is described. The anionic ligand was carefully selected to produce a structure (see Figure) with physical properties suitable for CVD requirements. Films grown using oxygen as carrier gas produced iridium thin films with a purity higher than 98 % and a measured resistivity in the range of 8.4 to 10.2 μΩ cm. ; NRC Pub: yes