Plate supported carbon membranes were prepared by precursor of 1, 4-bis(4-amino-2-trifluoromethylphenoxy) benzene-1, 2, 3, 4-cyclobutanetetracar-boxylic dianhydride type polyimide modified with zeolite ZSM-5, through the processes of spin-coating and pyrolysis. Thermal stability of precursor, surface functional groups, microstructure, morphology, and separation performance of membranes were characterized by the techniques of thermogravimetric analysis, infrared spectroscopy, X-ray diffraction, scanning electron microscope, and gas permeation, respectively. Effects of incorporating amount of ZSM-5 and pyrolysis temperature on structure and gas separation performance of carbon membranes were investigated. Results show that thermal stability and carbon residue of precursor are reduced by ZSM-5 modification. Simultaneously, the microstructure of carbon membranes becomes more compact. Incorporation of zeolite remarkably increases the gas permeability of carbon membranes. In addition, the gas permeability first decreases then increases with increased incorporation of ZSM-5. As the pyrolysis temperature elevating, both permeability and selectivity of as-obtained carbon membranes decrease. The separation performance performance of hybrid carbon membranes prepared at pyrolysis temperature of 650 degrees C is by far the Robeson's upper bound for H-2/N-2 system.