Published in
American Institute of Physics, Applied Physics Letters, 9(108), p. 093109
DOI: 10.1063/1.4942892
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Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas
Journal article published in 2016 by
G. Cunge,
M. Darnon 
,
J. Dubois,
P. Bezard,
O. Mourey ,
C. Petit Etienne ,
L. Vallier,
E. Despiau Pujo,
N. Sadeghi
,
J. Dubois,
P. Bezard,
O. Mourey ,
C. Petit Etienne ,
L. Vallier,
E. Despiau Pujo,
N. Sadeghi
This paper was not found in any repository, but could be made available legally by the author.
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