Published in
Elsevier, Superlattices and Microstructures
DOI: 10.1016/j.spmi.2016.02.050
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Residual Stress in AlN Films Grown on Sapphire Substrates by Molecular Beam Epitaxy
Journal article published in 2016 by
Xin Rong 
,
Xinqiang Wang,
Guang Chen,
Jianhai Pan,
Ping Wang,
Huapeng Liu,
Fujun Xu,
Pingheng Tan,
Bo Shen
,
Xinqiang Wang,
Guang Chen,
Jianhai Pan,
Ping Wang,
Huapeng Liu,
Fujun Xu,
Pingheng Tan,
Bo Shen
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