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IOP Publishing, Japanese Journal of Applied Physics, 8S(52), p. 08JN04, 2013

DOI: 10.7567/jjap.52.08jn04

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Capacitance Voltage Characteristics and Electron Holography on Cubic AlGaN/GaN Heterojunctions

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Cubic Al x Ga1-x N/GaN heterostructures were grown by plasma-assisted molecular beam epitaxy on free-standing 3C-SiC(001). The samples consist of an unintentionally doped 600 nm thick c-GaN buffer and a 30 nm c-Al0.3Ga0.7N layer. Capacitance–voltage measurements were performed on metal–oxide–semiconductor heterojunction structure using SiO2 as an insulator. A depth profile of the net donor concentration N CV of the grown sample was measured, demonstrating a clear carrier accumulation at the heterojunction. By electron holography in a transmission electron microscope the potential profile was measured and a free electron concentration of 5.1×1011 cm-2 was estimated at the c-Al x Ga1-x N/GaN interface. Using a one-dimensional (1D) Poisson simulator the results of both techniques are compared and a conduction-to-valence band offset ratio of about 4:1 for the cubic Al x Ga1-x N/GaN interface is estimated, which promotes the electron accumulation. Our results demonstrate that the two-dimensional electron gas (2DEG) in cubic Al x Ga1-x N/GaN heterostructures can be achieved without the need of polarization effects and is due to the residual background doping in the Al x Ga1-x N and GaN.