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IOP Publishing, Japanese Journal of Applied Physics, 6(48), p. 060206, 2009

DOI: 10.1143/jjap.48.060206

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Design of a Near-Perfect Anti Reflective Layer for Si Photodetectors Based on a SiO2Film Embedded with Si Nanocrystals

Journal article published in 2009 by Eunice Shing Mei Goh, Tu Pei Chen, Chang Qing Sun ORCID, Liang Ding, Yang Liu
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

An anti reflective layer for Si photodetectors working at various wavelengths is designed based on a SiO2 film containing Si nanocrystals (nc-Si). It is shown that with a proper amount of nc-Si distributed in the oxide and at the right thickness of the film, a single layer of nc-Si/SiO2 film can serve as a perfect anti reflection coating with very low or insignificant light loss. For example, for a 110 nm layer with an nc-Si volume fraction of 34%, the reflectance and the transmittance at the wavelength of 850 nm can reach 0.008 and 99.99%, respectively.