Published in
American Institute of Physics, Journal of Applied Physics, 12(118), p. 123302
DOI: 10.1063/1.4931370
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Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
Journal article published in 2015 by
G. Cunge,
D. Ferrah,
C. Petit Etienne 
,
A. Davydova,
H. Okuno,
D. Kalita,
V. Bouchiat,
O. Renault
,
A. Davydova,
H. Okuno,
D. Kalita,
V. Bouchiat,
O. Renault
This paper is available in a repository.
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