Chabazite zeolites with trimodal porosity (native micropores of CHA framework/additional larger micropores/mesopores) were synthesized by use of a diquarternary ammonium type surfactant C22-4-4 cations and fluoride anions in the synthesis of SSZ-13 zeolite. The fully crystalline hierarchical SSZ-13 zeolites are similar in acidity to bulk SSZ-13 zeolite. The increased diffusion rate in the hierarchical SSZ-13, proved by uptake experiments of bulky molecules and selective staining by thiophene oligomers formed in micropores larger than the CHA pore system, resulted in much slower catalyst deactivation in the methanol-to-olefins (MTO) reaction. Confocal fluorescent images of hierarchical SSZ-13 zeolite reveal a more homogeneous distribution of carbonaceous deposits, indicating that the micropore space has been completely utilized during the MTO reaction.