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Trans Tech Publications, Materials Science Forum, (483-485), p. 213-216, 2005

DOI: 10.4028/www.scientific.net/msf.483-485.213

Trans Tech Publications, Materials Science Forum, p. 213-216

DOI: 10.4028/0-87849-963-6.213

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Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Journal article published in 2005 by Jörg Pezoldt, Efstathios K. Polychroniadis, Thomas-H. Stauden, Gernot Ecke, Thierry Chassagne ORCID, P. Vennéguès, André Leycuras, D. Panknin, J. Stoemenos, Wolfgang Skorupa
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

The influence of the different additions to the melt on the nucleation behavior during short time flash lamp processing was investigated. It was observed that germanium and carbon additions to the silicone melt led to an increase of the mass transport to the growing surface and to an increase of the nuclei size. In the case of germanium additions to the silicon melt an incorporation of germanium in the silicon substrate was observed.