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Trans Tech Publications, Defect and Diffusion Forum, (363), p. 225-230, 2015

DOI: 10.4028/www.scientific.net/ddf.363.225

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Neutron Reflectometry for the Investigation of Self-Diffusion in Amorphous Silicon

Journal article published in 2015 by Florian Strauß, Thomas Geue, Jochen Stahn, Harald Schmidt
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We present experiments based on neutron reflectometry in combination with 29Si/natSi isotope multilayers in order to investigate the self-diffusion in amorphous silicon. Such experiments allow the detection of diffusion processes in the amorphous state on length scales below 10 nm. First results at 650 °C show a continuous decrease of the artificial Bragg peak produced by the multilayer, corresponding to a diffusivity of (1.1 ± 0.4) x 10-20 m2/s on a length scale of 2 - 7 nm. The diffusivity is not time-dependent for annealing times between 3 min and 1 h. Compared to recent measurements in silicon single crystals by the same method, the diffusivity is higher by a factor of about 105.