Trans Tech Publications, Defect and Diffusion Forum, (363), p. 225-230, 2015
DOI: 10.4028/www.scientific.net/ddf.363.225
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We present experiments based on neutron reflectometry in combination with 29Si/natSi isotope multilayers in order to investigate the self-diffusion in amorphous silicon. Such experiments allow the detection of diffusion processes in the amorphous state on length scales below 10 nm. First results at 650 °C show a continuous decrease of the artificial Bragg peak produced by the multilayer, corresponding to a diffusivity of (1.1 ± 0.4) x 10-20 m2/s on a length scale of 2 - 7 nm. The diffusivity is not time-dependent for annealing times between 3 min and 1 h. Compared to recent measurements in silicon single crystals by the same method, the diffusivity is higher by a factor of about 105.