Fluorinated microwave exfoliated graphite oxide samples containing 5.7–29.3 at% of fluorine were prepared by gas phase treatment of microwave exfoliated graphite oxide (MEGO) with XeF2. According to X-ray photoelectron spectroscopy and IR spectroscopy data, fluorination of MEGO occurs at C = C bonds while leaving the oxygenated domains intact, and increases O/C ratio. Cyclic voltammetry studies of fluorination effect on double layer capacitance of MEGO shows 67% growth of its specific capacitance making such and related carbon materials prospective for supercapacitor applications.