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Central Library, Journal of large-scale research facilities, (2)

DOI: 10.17815/jlsrf-2-67

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FEI Titan 80-300 STEM

Journal article published in 2016 by Marc Heggen ORCID, Martina Luysberg ORCID, Karsten Tillmann
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The FEI Titan 80-300 STEM is a scanning transmission electron microscope equipped with a field emission electron gun, a three-condenser lens system, a monochromator unit, and a Cs probe corrector (CEOS), a post-column energy filter system (Gatan Tridiem 865 ER) as well as a Gatan 2k slow scan CCD system. Characterised by a STEM resolution of 80 pm at 300 kV, the instrument was one of the first of a small number of sub-ångström resolution scanning transmission electron microscopes in the world when commissioned in 2006.