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American Institute of Physics, Applied Physics Letters, 6(99), p. 062113

DOI: 10.1063/1.3624598

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Link between crystal quality and electrical properties of metalorganic vapour phase epitaxy InxGa1-xN thin films

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This paper is available in a repository.

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Abstract

We report on the crystal quality of metalorganic vapour phase epitaxy-grown InGaN with indium content ranging from 0% to 20%. Absorbance measurements are fit to a model including band tails and a defect represented as a Brendel oscillator (R. Brendel, Appl. Phys. A 50, 587, 1990). Band tail absorbance, corresponding to contorted bonds, increases with increased In content. Above 10% of In, the presence of another defect, the concentration of which increases with In content, has been correlated with x-ray diffraction and Raman. We suggest that this defect corresponds to nitrogen vacancies, in agreement with a reported model for GaN.