Published in
2011 IEEE International Interconnect Technology Conference
DOI: 10.1109/iitc.2011.5940348
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Impact of ambient atmosphere on plasma-damaged porous low-k characterization
Journal article published in 2011 by
M. Darnon 
,
T. Chevolleau,
T. David,
N. Posseme,
R. Bouyssou,
R. Hurand,
O. Joubert,
C. Licitra,
N. Rochat,
F. Bailly,
C. Verove,
Ieee
,
T. Chevolleau,
T. David,
N. Posseme,
R. Bouyssou,
R. Hurand,
O. Joubert,
C. Licitra,
N. Rochat,
F. Bailly,
C. Verove,
Ieee
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