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Darnon et al., 2011
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@inproceedings{Darnon2011, author = {Darnon, M. and Chevolleau, T. and David, T. and Posseme, N. and Bouyssou, R. and Hurand, R. and Tiphine, C. and El Kodadi, M. and Besacier, M. and Schiavone, P. and Joubert, O. and Licitra, C. and Rochat, N. and Bailly, F. and Verove, C.}, month = {may}, title = {Characterizing plasma-damaged porous low-k}, year = {2011} }
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Characterizing plasma-damaged porous low-k
Proceedings article published in 2011 by
M. Darnon
,
T. Chevolleau
,
T. David
,
N. Posseme
,
R. Bouyssou
,
R. Hurand
,
C. Tiphine
,
M. El Kodadi
,
M. Besacier
,
P. Schiavone
,
O. Joubert
,
C. Licitra
,
N. Rochat
,
F. Bailly
,
C. Verove
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