Published in
IOP Publishing, Nanotechnology, 17(18), p. 175303
DOI: 10.1088/0957-4484/18/17/175303
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Reverse-contact UV nanoimprint lithography for multilayered structure fabrication
Journal article published in 2007 by
N. Kehagias,
V. Reboud,
G. Chansin,
M. Zelsmann,
C. Jeppesen,
C. Schuster,
M. Kubenz,
F. Reuther,
G. Gruetzner,
C. M. Sotomayor Torres 
This paper is available in a repository.
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