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American Chemical Society, Journal of Physical Chemistry C, 33(112), p. 12754-12759, 2008

DOI: 10.1021/jp8037363

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Carboxylic acids as oxygen sources for the atomic layer deposition of high-k metal oxides

Journal article published in 2008 by Erwan Rauwel, M.-G. Wllinger, Marc-Georg Willinger ORCID, Frédérique Ducroquet, Protima Rauwel ORCID, Igor Matko, Dmitry Kiselev, I. Bdikin, Nicola Pinna ORCID
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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