Published in
2011 IEEE International Interconnect Technology Conference
DOI: 10.1109/iitc.2011.5940350
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Scatterometric Porosimetry for porous low-k patterns characterization
Proceedings article published in 2011 by
R. Hurand,
R. Bouyssou,
M. Darnon 
,
C. Tiphine,
C. Licitra,
M. El Kodadi,
T. Chevolleau,
T. David,
N. Posseme,
M. Besacier,
P. Schiavone,
F. Bailly,
O. Joubert,
C. Verove
,
C. Tiphine,
C. Licitra,
M. El Kodadi,
T. Chevolleau,
T. David,
N. Posseme,
M. Besacier,
P. Schiavone,
F. Bailly,
O. Joubert,
C. Verove
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International audience