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Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

DOI: 10.1117/12.425337

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Design and test of new high Q microresonators fabricated by UV-LIGA

This paper is available in a repository.
This paper is available in a repository.

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Abstract

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench set-up and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.