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A novel MEMS shock switch with movable contact point to prolong contact time

Journal article published in 2009 by H.-G. Cai ORCID, G.-F. Ding, Z.-Q. Yang, Z.-W. Zhou, H. Wang
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Preprint: policy unknown
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Postprint: policy unknown
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Abstract

A novel shock switch based on a micro-electro-mechanical system (MEMS) for vibration monitoring was designed and fabricated by non-silicon surface micromaching technology. It consisted of three main parts: the proof mass as the movable electrode, the cross beam as the stationary electrode and the movable contact point to prolong the contact time. The ANSYS model was built, by which the modal analysis was carried out showing that the new design reduced the sensitivity to off-axis accelerations compared with the previous design, and the physical parameters were extracted from the structure so they could be used in the Simulink model. Through the dynamic simulation, the contact-enhancing mechanism was verified and compared with the traditional design. The fabricated micro shock switch was tested with a dropping hammer experiment. Test results indicated that the threshold acceleration was about 145 g and a stable contact time of over 50 μs was observed under a half-sine wave shock load acceleration with 1ms duration, in agreement with the simulation results. The contact effect was improved significantly as expected and the proposed model was able to describe the device's behavior correctly.