Abstract The attenuation of synchrotron based Soft X ray Emission Spectra SXES has been quantitatively analysed in layered model systems. The possibility to extend the standard qualitative analysis of SXES to exploit the information underlying the emission intensity was examined for thin layer structures. Three different experiment series were accomplished with model layer systems based on different sulphur containing substrates a MoS2, b CuInS2, c Cu In,Ga S,Se 2. The absorption of the S L2,3 emission line by ZnO cover layers of up to 80nm thickness was monitored and compared to theoretical expectations. By comparison with suitable reference spectra the attenuation of the S L2,3 emission could be used to accurately determine the ZnO overlayer thickness up to a critical thickness, depending on the setup and the net S L2,3 emission intensity. The results from these local, energy resolved spot measurements were compared with locally resolved scans of the integral S L2,3 emission intensity over areas of several mm2. In the scan images the attenuation of the S L2,3 emission intensity clearly reflects the local ZnO layer thickness. From the attenuation the ZnO layer thicknesses were calculated and compared to ellipsometric measurements and were found to be in excellent agreement. These results demonstrate the benefits of a quantitative analysis of SXES, making it an even more powerful tool to examine buried interfaces and to monitor lateral inhomogeneities