Published in
IEEE/LEOS International Conference on Optical MEMs
DOI: 10.1109/omems.2002.1031475
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Digital holography for characterization and testing of MEMS structures
Proceedings article published in 2002 by
P. Ferraro,
G. Coppola 
,
S. De Nicola,
A. Finizio,
S. Grilli ,
M. Iodice,
C. Magro,
G. Pierattini,
Ieee
,
S. De Nicola,
A. Finizio,
S. Grilli ,
M. Iodice,
C. Magro,
G. Pierattini,
Ieee
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Abstract
Summary form only given. Digital holography is proposed as a non-contact method for the inspection and characterization of MEMS. The method can be useful for assessing the fabrication process and the functionality as well as the reliability of micromachined structures.