American Institute of Physics, Applied Physics Letters, 20(104), p. 204102
DOI: 10.1063/1.4878841
Full text: Download
Based on the exact solution of the electric field, the contact resistance is calculated and compared with the widely used lumped-circuit transmission line model. Our model fully accounts for the spreading resistance, and is applicable to arbitrary contact size, film thickness, and resistivity in different parts forming the contact. The regimes dominated by the specific contact resistance or by the spreading resistance are identified and compared with experimental data. (C) 2014 AIP Publishing LLC.