Published in
Trans Tech Publications, Materials Science Forum, (679-680), p. 213-216, 2011
DOI: 10.4028/www.scientific.net/msf.679-680.213
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Complete Determination of the Local Stress Field in Epitaxial Thin Films Using Single Microstructure
Journal article published in 2011 by
Massimo Camarda 
,
Ruggero Anzalone,
Andrea Severino,
Nico Piluso,
Antonino La Magna,
Francesco La Via
,
Ruggero Anzalone,
Andrea Severino,
Nico Piluso,
Antonino La Magna,
Francesco La Via
This paper is made freely available by the publisher.
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Abstract
In this article, using finite element simulations and analytical approaches, we demonstrate that planar rotators [1] can be effectively used to determine both the uniform and gradient residual stresses in thin films with higher accuracy compared to other microstructures.