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American Institute of Physics, Journal of Applied Physics, 2(98), p. 023306

DOI: 10.1063/1.1947387

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Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge operating in Ar∕SF6 mixtures

Journal article published in 2005 by N. Plihon, C. S. Corr ORCID, P. Chabert, J.-L. Raimbault
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

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Data provided by SHERPA/RoMEO

Abstract

It has previously been shown Tuszewski et al., Plasma Sources Sci. Technol. 12, 396 2003 that inductive discharges in electronegative gases are subject to two types of instability: the source instability related to the E to H transition and a transport instability, occurring downstream when an expanding chamber is present. These two types of instability are observed in our "helicon" reactor operated without a static magnetic field in low-pressure Ar/ SF 6 mixtures. Temporally and spatially resolved measurements show that, in our experiment, the downstream instability is a periodic formation and propagation of a double layer. The double layer is born at the end of the source tube and propagates slowly to the end of the expansion region with a velocity of 150 m s −1 . © 2005 American Institute of Physics.