Published in
IOP Publishing, Journal of Physics: Conference Series, 18(425), p. 182004, 2013
DOI: 10.1088/1742-6596/425/18/182004
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The ID21 scanning X-ray microscope at ESRF
Journal article published in 2013 by
M. Salomé,
M. Cotte,
R. Baker,
R. Barrett,
N. Benseny Cases 
,
G. Berruyer,
D. Bugnazet,
H. Castillo Michel,
C. Cornu,
B. Fayard,
E. Gagliardini,
R. Hino,
J. Morse,
E. Papillon,
E. Pouyet
and other authors.
,
G. Berruyer,
D. Bugnazet,
H. Castillo Michel,
C. Cornu,
B. Fayard,
E. Gagliardini,
R. Hino,
J. Morse,
E. Papillon,
E. Pouyet
and other authors.
This paper is made freely available by the publisher.
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Abstract
The ID21 Scanning X-ray Microscope (SXM) is optimized for micro-spectroscopy with submicron resolution in the 2 to 9.5 keV energy range. After a brief description of the microscope setup, we present here recent developments, in particular, the latest version of the compact Wavelength Dispersive Spectrometer and the refurbished cryo-stage.