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Guttmann et al., 2009
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@misc{Guttmann2009, abstract = {Galvanotechnik, 100(2009) S.2616-24}, author = {Guttmann, M. and Kaiser, K. and Muth, S. and Moritz, H. and Schmidt, R. and Zwanzig, M. and Hofmann, L. and Schubert, I.}, month = {jan}, title = {Neues modulares Anlagenkonzept für nasschemische Ätzprozesse und die Wafergalvanoformung.}, year = {2009} }
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Neues modulares Anlagenkonzept für nasschemische Ätzprozesse und die Wafergalvanoformung.
Published in 2009 by
M. Guttmann
,
K. Kaiser
,
S. Muth
,
H. Moritz
,
R. Schmidt
,
M. Zwanzig
,
L. Hofmann
,
I. Schubert
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Abstract
Galvanotechnik, 100(2009) S.2616-24